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Infrastructure

  • Ambios XP-200 profilometer
  • P-17 profilometer
  • Four-point probes
  • Broadband dielectric impedance spectrometer (Novocontrol)
  • Chemical-mechanical polishing machine
  • LTCC co-combustion furnace
  • Isotemp 750 furnace
  • LTCC cutting machine
  • Isostatic press
  • LTCC stacker
  • LTCC screen printer
  • LTCC punch
  • LPKF Protolaser U3
  • AlN SPT-160 sprayer
  • SPT-330H sprayer
  • Atomic Layer Deposition (ALD) system
  • Thermal evaporator
  • Spray-coating device
  • Ceradrop
  • Samba printing engine
  • Z Probes (50 GHz, 67 GHz)
  • E5061 vector network analyzer (VNA)
  • N5225A PNA
  • A4402 spectrum analyzer
  • FSW 50 signal and spectrum analyzer
  • SMW 200A vector signal generator
  • MSO-X 4104A mixed-signal oscilloscope
  • RSA 5126B real-time signal analyzer
  • 16853A / TLA 7012 logic analyzer
  • MDO 4054-3 mixed-domain oscilloscope
  • E4438C vector signal generator
  • AWG 7082C / AWG 7122C arbitrary waveform generator
  • SR560 low-noise preamplifier
  • PXA N9030A signal analyzer
  • PXIe-1075
  • E4437B series signal generator
  • MSO 71254C mixed-signal oscilloscope
  • RSA 607A real-time spectrum analyzer
  • N4906B serial BERT
  • Amarisoft Callbox
  • CPT10 passive optical component testing platform
  • TUNICS T100S tunable laser
  • OSA20-58 optical spectrum analyzer
  • High-power attenuator
  • Broadband light source
  • Nanoquest I ion beam etching system
  • Rotating photosensitive resin applicator
  • Critical point dryer
  • Ultrasonic bath
  • IMP SF-100 maskless lithography system
  • OAI 80MBA mask aligner system
  • Wet bench
  • Stress measurement system
  • Pharos laser
  • Coherent Discovery NX laser with Total Power Control (TPC)
  • Toptica FemtoErb dual-output laser
  • Sprout 5 W, 532 nm, CW laser
  • Intense THz source (with Pharos)
  • Terahertz camera (INO)
  • Diode Schottky terahertz (fast – 4 GHz)
  • Diode Schottky terahertz (high sensitivity)
  • Fast optical delay line (APE – 50 ps)
  • SR830 lock-in amplifier
  • SR865A lock-in amplifier
  • Zurich Instruments UHFLI Lockin/BoxCar
  • DG645 delay generator
  • ADC Acqiris double card (2 GHz – 4 GS/s, 14 bits)
  • FROG system (Mesa Photonics)
  • FINEPLACER Pico-145 flip chip bonder
  • Hybond 522A manual ball bonder
  • K&S 4522 manual ball bonder
  • M17S automatic wire bonder
  • Automatic pick and place 
  • SEM TM 3000
  • OLS 400 confocal microscope
  • VHX 7000 optical microscope
  • Olympus optical microscope
  • Dino-Lite digital microscope
  • Class 2 Type A2 biological safety cabinet
  • Vibrometer (OFV-2570)
  • Micro probe station (Nextron)
  • Probe station
  • Shaker
  • Environmental test chamber (TPS T10RC)
  • ST350 industrial oven
  • Vacuum test chamber
  • Tegam 2350 high-voltage amplifier
  • 33600A signal generator
  • Tabor 9260 amplifier
  • AFG3252 signal/function generator