Infrastructure
- Ambios XP-200 profilometer
- P-17 profilometer
- Four-point probes
- Broadband dielectric impedance spectrometer (Novocontrol)
- LTCC Laboratory
- Chemical-mechanical polishing machine
- LTCC co-combustion furnace
- Isotemp 750 furnace
- LTCC cutting machine
- Isostatic press
- LTCC stacker
- LTCC screen printer
- LTCC punch
- LPKF Protolaser U3
- AlN SPT-160 sprayer
- SPT-330H sprayer
- Atomic Layer Deposition (ALD) system
- Thermal evaporator
- Spray-coating device
- Ceradrop
- Samba printing engine
- Z Probes (50 GHz, 67 GHz)
- E5061 vector network analyzer (VNA)
- N5225A PNA
- A4402 spectrum analyzer
- FSW 50 signal and spectrum analyzer
- SMW 200A vector signal generator
- MSO-X 4104A mixed-signal oscilloscope
- RSA 5126B real-time signal analyzer
- 16853A / TLA 7012 logic analyzer
- MDO 4054-3 mixed-domain oscilloscope
- E4438C vector signal generator
- AWG 7082C / AWG 7122C arbitrary waveform generator
- SR560 low-noise preamplifier
- PXA N9030A signal analyzer
- PXIe-1075
- E4437B series signal generator
- MSO 71254C mixed-signal oscilloscope
- RSA 607A real-time spectrum analyzer
- N4906B serial BERT
- Amarisoft Callbox
- CPT10 passive optical component testing platform
- TUNICS T100S tunable laser
- OSA20-58 optical spectrum analyzer
- High-power attenuator
- Broadband light source
- LTCC Laboratory
- Nanoquest I ion beam etching system
- Rotating photosensitive resin applicator
- Critical point dryer
- Ultrasonic bath
- IMP SF-100 maskless lithography system
- OAI 80MBA mask aligner system
- Wet bench
- Stress measurement system
- Pharos laser
- Coherent Discovery NX laser with Total Power Control (TPC)
- Toptica FemtoErb dual-output laser
- Sprout 5 W, 532 nm, CW laser
- Intense THz source (with Pharos)
- Terahertz camera (INO)
- Diode Schottky terahertz (fast – 4 GHz)
- Diode Schottky terahertz (high sensitivity)
- Fast optical delay line (APE – 50 ps)
- SR830 lock-in amplifier
- SR865A lock-in amplifier
- Zurich Instruments UHFLI Lockin/BoxCar
- DG645 delay generator
- ADC Acqiris double card (2 GHz – 4 GS/s, 14 bits)
- FROG system (Mesa Photonics)
- FINEPLACER Pico-145 flip chip bonder
- Hybond 522A manual ball bonder
- K&S 4522 manual ball bonder
- M17S automatic wire bonder
- Automatic pick and place
- SEM TM 3000
- OLS 400 confocal microscope
- VHX 7000 optical microscope
- Olympus optical microscope
- Dino-Lite digital microscope
- Class 2 Type A2 biological safety cabinet
- Vibrometer (OFV-2570)
- Micro probe station (Nextron)
- Probe station
- Shaker
- Environmental test chamber (TPS T10RC)
- ST350 industrial oven
- Vacuum test chamber
- Tegam 2350 high-voltage amplifier
- 33600A signal generator
- Tabor 9260 amplifier
- AFG3252 signal/function generator